Mirrors which have both the durability and the reliability of transmission of a high-power laser beam without decreasing its quality.Materials
Considering for optical precision, Copper (Cu) and Silicon (Si) are used because they have superior processing characteristics for optical precision and superior heat conductance for cooling efficiency. For parts where adhesion of sputtering is intense, Molybdenum (Mo), which have material characteristics of a high melting point and high hardness, is used.
Various coatings are used on the mirror surface to secure reflectivity and improve polarization control, and improvement of durability. It is necessary to choose a type of coating according to the usage and use environment.